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High-precision Z-axis voice coil motor stage V-Z03 | Precision high rigidity drive

High-precision Z-axis voice coil motor stage V-Z03 | Precision high rigidity drive

Achieving sub-micron precision Z-axis control with high-speed response and high-rigidity guide.

The V-Z03 achieves high-speed and high-precision Z-axis control through a direct drive system using a voice coil motor. With a high-rigidity cross roller guide and linear encoder, it enables fine movements with a minimum of 0.035µm. It supports a maximum load of 150N and is equipped with a self-locking function and pneumatic counterbalance. It demonstrates excellent performance in demanding fields such as semiconductor manufacturing and precision measurement.

  • Other machine elements
  • Solenoid Actuators
  • encoder
  • Coil Motor Stage

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High-Precision Z-Axis Voice Coil Motor Stage V-Z03 for Research and Development

High-Precision Z-Axis Voice Coil Motor Stage V-Z03 for Research and Development

Achieves sub-micron level precision Z-axis control with high-speed response and high rigidity.

In experiments in the field of research and development, precise positioning and stable operation are essential. Particularly in the observation of fine structures and precision machining, accurate control in the Z-axis direction determines the success or failure of the experiment. Conventional stages have issues with positioning accuracy and response speed, which have been factors that reduce the efficiency of experiments. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed and high-precision Z-axis control. 【Application Scenarios】 - Precision positioning in industrial and research fields - Semiconductor inspection 【Benefits of Implementation】 - Precise positioning at the sub-micron level - Reduction in experiment time - Improvement in experimental accuracy - Adaptability to diverse experiments

  • Other machine elements
  • Solenoid Actuators
  • encoder
  • Coil Motor Stage

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